Astex / ETO
RF Generator Repair
80-S09-uW 80-S10-HP
80-S14
We can test and calibrate your system for optimum performance. We will go through and verify all upgrades and system parameters.
Sub-Assemblies
We repair all sub-assemblies to this product line. We insure that each module meets or exceeds all manufactures specifications.
How we Test and Repair
We use actual repair manuals and schematics to test and repair all equipment. We do not use computer driven trackers which are found to be very unreliable.
We also have many of the parts in stock.
|
80-S09-uW
CVD Specific Parts | ||
|
MODEL
| NAME |
AMAT #
|
| 80-S09-uW | CVD RF Generator | 0190-18181 |
| ABX-X355 | System Controller Rev-T | 0190-02977 |
| ARX-X248 | 13.56MHz Driver | 0190-18146 |
| ARX-X250 | 2.0MHz Watt Meter | 0190-18139 |
| ARX-X252 | 13.56MHZ Watt Meter | 0190-18145 |
| ARX-X491 | Microwave Controller | 0190-00398 |
| B13359-100 | uW Cable, 100ft, 7 conductor | 0190-18189 |
| B13359-55 | uW Cable, 55ft, 7 conductor | 0190-18186 |
| B13360-100 | uW Cable, 100ft, 15 conductor | 0190-18190 |
| B13360-55 | uW Cable, 55ft, 15 conductor | 0190-18187 |
| C13811-100 | uW Cable, 100ft, HV, 4P | 0190-18333 |
| C13811-55 | uW Cable, 55ft, HV, 4P | 0190-18331 |
| D13449 | Magnetron Head Use PAX-X171 | |
| D13450 | Microwave Controller Use ARX-X491 | |
| DRX-X148 | HV Diode Block | 0190-18155 |
| KVX-X107 | Ross Relay | 0190-18156 |
| MSX-X745 | RF Output Safety Cover | 0190-18142 |
| PAX-X171 | Magnetron Head | 0190-18128 |
|
80-S10-HP
Etch Specific Parts | ||
|
MODEL
| NAME |
AMAT #
|
| 80-S10-HP | Complete ETCH System | 0920-01076 |
| 80-I01 | ICM Module | 0190-36685 |
| 80-P01-HP | EPS Power Supply | 0190-36684 |
| ABX-X434 | System Controller | 0190-36677 |
| ARX-X256 | 2.3Mhz Watt Meter | 0190-36679 |
| ARX-X258 | 2.0MHz Watt Meter | 0190-36680 |
| ARX-X268 | 1.7MHz Watt Meter | 0190-36681 |
| MSX-X8106 | Watt meter Cover (1.7MHz) N/A | |
| MSX-X8109 | Watt meter Cover (2.0-2.3MHz) | 0190-36684 |
| ABX-X517 | 13.56 Mhz System Controller | |
|
80-S09-uW
and 80-S10-HP Common Parts | ||
|
MODEL
| NAME |
AMAT #
|
| ABX-X272 | PS Control Board | 0190-18138 |
| ABX-X284 | HV Capacitor Bank | 0190-18136 |
| ABX-X285 | HV Filter Board Use ABX-X494 | |
| ABX-X286 | 24V Power Supply | 0190-18153 |
| ABX-X299 | 12V Power Supply | 0190-01954 |
| ABX-X302 | Diode Board | 0190-18154 |
| ABX-X494 | HV Filter Board | 0190-01291 |
| APP-X024 | DI Return Water Manifold | 0190-18160 |
| APP-X025 | DI Supply Water Manifold | 0190-18159 |
| APP-X028 | DI Water Reservoir | 0190-18161 |
| APP-X029 | DI Water Drain Manifold | 0190-18162 |
| APX-X015 | Air Filter Assy. 6” x 6” | 0190-18144 |
| APX-X138 | Fan, Power Supply Rear | 0190-18164 |
| APX-X139 | Fan, RF Deck Rear | 0190-18163 |
| ARX-X216 | PA Tube | 0540-01010 |
| ARX-X247 | 1.8-2.3MHz Driver Use ARX-X490 | |
| ARX-X267 | 1.5-2.5MHz Driver Use ARX-X490 | |
| ARX-X490 | 1.5-2.5MHz Driver | 0190-01292 |
| AUX-X023 | Smoke Detector | 0190-18134 |
| AUX-X025 | Water Leak Detector | 0190-18127 |
| BLX-X125 | PS Front Fan Assy. | 0190-18165 |
| BLX-X312 | Air Filter Assy. 8”x15” | 0190-18157 |
| KDX-X106 | K3, K4, K5 Relay N/A | |
| KDX-X135 | K7 Relay | 0190-18280 |
| KDX-X136 | K6 Relay | 0190-18279 |
| PLX-X014 | Flow Switch | 0190-18277 |
| PLX-X089 | DI Pump Assembly | 0190-18278 |
| PLX-X090 | Heat Exchanger | 0190-18143 |
| PLX-X125 | DI Canister | 0190-18158 |
| RXX-X116 | Thermal Temp. Sensor | 0190-18276 |
| STX-X140 | Circuit Breaker | 0190-18286 |
| TPX-X162 | Filament (T3) Transformer | 0190-00510 |
| TPX-X163 | 45V (T2) Transformer | 0190-00509 |